CVD of Compound Semiconductors: Precursor Synthesis, Developmeny and ... - Anthony C. Jones, Paul O'Brien - Google Books

https://books.google.de/books?id=5bLXwDPxQ08C&pg=PA55#v=onepage

Chemical growth methods of electronic materials are the keystone of microelectronic device processing. This book discusses the applications of metalorganic chemistry for the vapor phase deposition of compound semiconductors. Vapor phase methods used for…